A Practical OEM Checklist for Specifying a Semiconductor Heater
https://engineered-heater-lab.wordcanopy.com/posts/how-temperature-sensors-can-be-integrated-with-a-pi-heater
In etch equipment, a semiconductor heater must deliver heat in a controlled way. It uses a resistive heating element integrated with an electrically insulating structure. One useful trait is repeatable heat delivery